1081-Nano & Microelectromechanic System-51026

Registration：Now ~ Any Time
Course Period：2019-08-01 ~ 2020-01-31

• 2019A奈微機電系統
• W1_INTRODUCTION
• W2_Scaling Effect
• W3_NMEMS_PROCESS
• W4_NMEMS_PROCESS_IC
• W5_MEMSDesign
• W06MEMSSimulation
• Report 1 (報告1 說明)
• W07_NMEMS0406_Actuator S
• W8_MicroOpticComponents2
• 2019_NMEMS_Midterm
• W10NMEMS_Microfluidics
• W11_NMEMS_Microfluidics2
• W11_MicroThermalDevices
• W12_Smart_Materials
• W13_NMEMS_Sensor_Part1
• W14_NMEMS_Sensor_Part2
• W15_Chemical Sensor
• W16_BioMEMS
• crystal
• feynman_mems
• table_4_4
• TSMC專利簡介
• REF製程相關注意事項handout
• MEMS及感測器將加速物聯網普及
• 台積先進封裝
• 1081_2nd_Report
• 1081_Final_Project
• 2019A奈微機電系統PUB5