1132-MEMS Engineering and Applications-51017

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• 1082_CMOS MEMS 系統設計課程說明
• CMOS MEMS 及其於感測器之應用
• micromachines-07-00014
• integrating-mems-and-ics
• A flow direction sensor fabricated using MEMS technology and its simple interface circuit
• A Single-Crystal Silicon 3-axis CMOS-MEMS Accelerometer
• Microelectronic capacitance transducer for particle detection
• Microfabrication Techniques for Chemical_Bio_Sensor