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成 绩:60 分
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1082_CMOS MEMS 系統設計課程說明
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2016408_微機電產業與技術
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CMOS MEMS 及其於感測器之應用
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micromachines-07-00014
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integrating-mems-and-ics
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A flow direction sensor fabricated using MEMS technology and its simple interface circuit
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A Single-Crystal Silicon 3-axis CMOS-MEMS Accelerometer
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Microelectronic capacitance transducer for particle detection
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Microfabrication Techniques for Chemical_Bio_Sensor
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CMOS-MEMS
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