通過條件
成 績 :60 分
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講義 --------------------------------
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CMOS-MEMS-ch7-10
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CMOS-MEMS-ch11
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微機電製程
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CIC_CMOS-MEMS-2007
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CIC_material_parameters
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新聞區 -------------------------------
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Bosch為微型MEMS產業搏下重注
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ST推動MEMS進軍消費領域
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新進者前仆後繼 MEMS代工產業競爭白熱化.
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車市拖累微機電
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MEMS 微機電市場前瞻
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ADVANCED PACKAGING 3D IC
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製程 ---------------------------
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A maskless post-CMOS bulk machinning
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MUMP process
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SCREAM Process
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CMOS-MEMS 製程技術與電腦輔助
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Chap3 加速計 -----------------------
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加速計/加速計系統晶片
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A Single-Crystal Silicon 3-axis CMOS-MEMS Accelerometer.
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MNEMS A new approach for ultra-low cost 3D inertial sensor
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A Very Low Cost 3-axis MEMS Accelerometer
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加速計回授控制
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MEMS陀螺儀測量系統
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熱型加速計
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麥克風 ---------------------------------------
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Microphone 簡介
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MEMS microphone at Draper
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MEMS 麥克風設計
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氣體偵測器 -------------------------------
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CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry
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CO consumption pd SnO type sensor
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Microelectronic capacitance transducer for particle detection
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微型甲醛氣體感測器之製作與應用
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Nanoparticle SnO2 Gas Sensor with Circuit and Micro heater on chip fabricated using CMOS-MEMS
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參考論文:Nanoparticle SnO2 Gas Sensor with Circuit and Micro heater on chip fabricated using CMOS-MEMS
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影音課程 -------------------------
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1215 影音課程
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0115 影音課程
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作業區 ----------------------------------------
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參考論文: A Low-Cost Uncooled Infrared Microbolometer CMOS MEMS.
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參考論文: Microbolometer Type Uncooled Infrared Detectors in Standard CMOS
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參考論文: NEC bolometer
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參考論文:Nanoparticle SnO2 Gas Sensor with Circuit and Micro heater on chip fabricated using CMOS-MEMS
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參考論文:CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry
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參考論文: Design of a single-chip pH sensor using a conventional 0.6-spl mu CMOS process
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